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(Color online) Schematic diagram of the three-stage virtual impactor and close-up view of the injection nozzle: , , , and are the thickness and width of the injection nozzle, jet-to-plate distance, and flow rate, respectively.
(Color online) Microfluidic simulation result for the first stage that the cutoff diameter is . (a) Flow stream line. (b) particle motion. (c) particle motion. (d) particle motion.
Characterization results of the flow rate distributor using a critical orifice.
(Color online) Optical photographs and packages of the fabricated devices. (a) Three-stage virtual impactor. (b) Flow rate distributor. (c) Packaging scheme. (d) Packaged devices.
(Color online) Schematic diagram of the experimental setup for the airborne particle classification.
(Color online) Particle classification results using the three-stage virtual impactor.
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