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Micromachined cascade virtual impactor with a flow rate distributor for wide range airborne particle classification
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10.1063/1.2763975
/content/aip/journal/apl/91/4/10.1063/1.2763975
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/4/10.1063/1.2763975
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram of the three-stage virtual impactor and close-up view of the injection nozzle: , , , and are the thickness and width of the injection nozzle, jet-to-plate distance, and flow rate, respectively.

Image of FIG. 2.
FIG. 2.

(Color online) Microfluidic simulation result for the first stage that the cutoff diameter is . (a) Flow stream line. (b) particle motion. (c) particle motion. (d) particle motion.

Image of FIG. 3.
FIG. 3.

Characterization results of the flow rate distributor using a critical orifice.

Image of FIG. 4.
FIG. 4.

(Color online) Optical photographs and packages of the fabricated devices. (a) Three-stage virtual impactor. (b) Flow rate distributor. (c) Packaging scheme. (d) Packaged devices.

Image of FIG. 5.
FIG. 5.

(Color online) Schematic diagram of the experimental setup for the airborne particle classification.

Image of FIG. 6.
FIG. 6.

(Color online) Particle classification results using the three-stage virtual impactor.

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/content/aip/journal/apl/91/4/10.1063/1.2763975
2007-07-26
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Micromachined cascade virtual impactor with a flow rate distributor for wide range airborne particle classification
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/4/10.1063/1.2763975
10.1063/1.2763975
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