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(Color online) (a) Illustrations of cross-sectional cut of the convex-shaped AlN air-bridge PC structure formed by PEC etching of SiC. (b) A magnification of air-bridge PC. (c) Laser microscope image of the membrane structure having a convex shape.
SEM images of a fabricated PC nanocavity with periodicity of . The inset shows a bird’s eye view of a hexagonal airhole. Crystal orientations are also indicated.
Room-temperature microscopic PL spectra taken from (a) L7 and (b) L3 PC nanocavities with different periodicities and a constant ratio of 0.30. The vertical scales are offset for clarity. The arrows indicate the lowest-order cavity modes. (c) The lowest-order peak of the -period L7 nanocavity fitted with a Lorentzian (dotted curve). (d) Normalized peak wavelength of the lowest-order cavity modes. Triangles: calculated (open symbols) and experimental (filled symbols) data for L7 cavities, Circles: calculated (open symbols) and experimental (filled symbols) data for L3 cavities.
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