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Fabrication schematics for a Fresnel microlens by FIB milling.
Fresnel microlens profile milled with different ion dose densities of , and .
SEM photographs of a Fresnel microlens milled with different ion beam dose densities of (a) , (b) , and (c) . (d) More detailed surface for (b) and (e) a Fresnel microlens array.
Forward current-voltage characteristics for flip-chip GaN LEDs with and without Fresnel microlens array. The inset shows the almost same spectra with and without Fresnel microlens array at the current of .
Optical power output as a function of forward current, and the inset shows the spatial optical intensity distribution as a function of radial distance from the center from the backside of flip-chip GaN LEDs with and without a Fresnel microlens array.
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