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Single-step fabrication of Fresnel microlens array on sapphire substrate of flip-chip gallium nitride light emitting diode by focused ion beam
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10.1063/1.2757602
/content/aip/journal/apl/91/5/10.1063/1.2757602
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2757602
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Fabrication schematics for a Fresnel microlens by FIB milling.

Image of FIG. 2.
FIG. 2.

Fresnel microlens profile milled with different ion dose densities of , and .

Image of FIG. 3.
FIG. 3.

SEM photographs of a Fresnel microlens milled with different ion beam dose densities of (a) , (b) , and (c) . (d) More detailed surface for (b) and (e) a Fresnel microlens array.

Image of FIG. 4.
FIG. 4.

Forward current-voltage characteristics for flip-chip GaN LEDs with and without Fresnel microlens array. The inset shows the almost same spectra with and without Fresnel microlens array at the current of .

Image of FIG. 5.
FIG. 5.

Optical power output as a function of forward current, and the inset shows the spatial optical intensity distribution as a function of radial distance from the center from the backside of flip-chip GaN LEDs with and without a Fresnel microlens array.

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/content/aip/journal/apl/91/5/10.1063/1.2757602
2007-07-31
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Single-step fabrication of Fresnel microlens array on sapphire substrate of flip-chip gallium nitride light emitting diode by focused ion beam
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2757602
10.1063/1.2757602
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