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Dynamic scaling in ion etching of tungsten films
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10.1063/1.2760157
/content/aip/journal/apl/91/5/10.1063/1.2760157
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2760157
/content/aip/journal/apl/91/5/10.1063/1.2760157
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/content/aip/journal/apl/91/5/10.1063/1.2760157
2007-08-03
2014-09-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamic scaling in ion etching of tungsten films
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2760157
10.1063/1.2760157
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