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Typical XRD scan profile of the GZO film with a thickness of . The diffraction intensity on the vertical axis is expressed in a logarithmic scale. The inset shows the full width at half maximum of (0002) -scan rocking curve as a function of film thickness below .
Cross-sectional TEM image of the GZO film with a thickness of . A single column is indicated by a broken line.
Resistivity, carrier concentration, and Hall mobility of GZO films as a function of film thickness in the range from .
Lattice parameters of and axes in GZO films as a function of film thickness below . These parameters are determined by the analysis of in-plane and out-of-plane XRD peak profiles. The volume of the crystallographic unit cell, calculated with the lattice parameters, is also shown.
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