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Schematic of the fringe-shifting interferometric laser lithography.
Experimental setup with a femtosecond laser, a diffractive beam splitter, and a phase shifter.
Absorbance of the polystyrene film used in the present study. Inset: chemical structure of polystyrene.
SEM images of laser-ablated regions: (a) before and (b) after the fringe shift. Beam polarization was circular.
SEM images of laser-ablated regions after the fringe shift: polarization was (a) vertical and (b) horizontal, represented by the arrows inset.
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