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Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes
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10.1063/1.2767764
/content/aip/journal/apl/91/5/10.1063/1.2767764
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2767764
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic representation and optical micrograph of the film bulk acoustic resonator used as test sample (a). Atomic force microscopy setup employed in this work (b).

Image of FIG. 2.
FIG. 2.

FBAR characterization results obtained in contact-mode AFM: vibration amplitude image (a) and cross section (b), frequency response (c), and effect of tip-sample force (d).

Image of FIG. 3.
FIG. 3.

Thermal spectrum of the AM-DFM cantilever around its first (a) and second (b) eigenmodes. Excitation of the second cantilever eigenmode by the FBAR vibration (c).

Image of FIG. 4.
FIG. 4.

FBAR characterization results obtained in AM-DFM: vibration amplitude image (a) and cross section (b), frequency response (c), and effect of tip-sample force (d).

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/content/aip/journal/apl/91/5/10.1063/1.2767764
2007-08-02
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2767764
10.1063/1.2767764
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