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IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique
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10.1063/1.2768024
/content/aip/journal/apl/91/5/10.1063/1.2768024
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2768024
/content/aip/journal/apl/91/5/10.1063/1.2768024
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/content/aip/journal/apl/91/5/10.1063/1.2768024
2007-08-02
2014-11-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/5/10.1063/1.2768024
10.1063/1.2768024
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