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Evolution of interfacial adhesion force in dynamic micromachines due to repetitive impact loading
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10.1063/1.2764111
/content/aip/journal/apl/91/6/10.1063/1.2764111
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2764111
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM micrograph of a surface micromachine specifically designed for repetitive impact testing. The image includes the electrical wiring diagram for electrostatic comb-drive actuation.

Image of FIG. 2.
FIG. 2.

SEM micrograph of the contact region showing the protrusion fabricated on one of the shuttles for contact area control.

Image of FIG. 3.
FIG. 3.

Normalized adhesion force vs impact cycles.

Image of FIG. 4.
FIG. 4.

SEM micrograph showing a portion of the sidewall contact interface after impact cycles (impacted area) and an area outside of the contact interface (control area).

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/content/aip/journal/apl/91/6/10.1063/1.2764111
2007-08-06
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Evolution of interfacial adhesion force in dynamic micromachines due to repetitive impact loading
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2764111
10.1063/1.2764111
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