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SEM micrograph of a surface micromachine specifically designed for repetitive impact testing. The image includes the electrical wiring diagram for electrostatic comb-drive actuation.
SEM micrograph of the contact region showing the protrusion fabricated on one of the shuttles for contact area control.
Normalized adhesion force vs impact cycles.
SEM micrograph showing a portion of the sidewall contact interface after impact cycles (impacted area) and an area outside of the contact interface (control area).
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