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Reduction of etched AlGaAs sidewall roughness by oxygen-enhanced wet thermal oxidation
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10.1063/1.2766859
/content/aip/journal/apl/91/6/10.1063/1.2766859
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2766859
/content/aip/journal/apl/91/6/10.1063/1.2766859
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/content/aip/journal/apl/91/6/10.1063/1.2766859
2007-08-06
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reduction of etched AlGaAs sidewall roughness by oxygen-enhanced wet thermal oxidation
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2766859
10.1063/1.2766859
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