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Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms
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View: Figures


Image of FIG. 1.
FIG. 1.

(Color online) Top: optical image of a typical architecture. Bottom: SEM image of the individual nanowire integrated as a chemiresistor using FIB technology.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Sensor responses to (top curve, red) and CO (bottom curve, blue) at 100, 50, and sequential pulses in dry air measured at a series of temperatures from . The curves have the same background conductance but have been offset for clarity. A second excursion through the temperature cycle was completed to confirm signal repeatability. The inserts are “zoomed” isothermal regions to show the increase of the signal onset rates with temperature. (b) The temperature dependence of the sensor response to of (red circles). Included (black squares) is the corresponding temperature dependence of the signal onset time constant. The optimal performance is achieved in the shaded region.

Image of FIG. 3.
FIG. 3.

(Color) Temperature-programed sensing (TPS) measurements, where the blue triangular wave (top) is the temperature profile of the sensor in time, and the black circles and red squares show the nanowire conductance measurements upon exposure to dry air and CO, respectively. The distinct differences between the signal patterns can serve as a means of discrimination.

Image of FIG. 4.
FIG. 4.

(Color online) Conductance response to pulses in air ( (ppb) step power law) measured at . In the inset, the conductance increase as a function of concentration is shown (log-log scale). The solid line shows the data fit with a power law curve.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Coupling nanowire chemiresistors with MEMS microhotplate gas sensing platforms