1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Surface studies of hydrogen etched on Si(001)
Rent:
Rent this article for
USD
10.1063/1.2768870
/content/aip/journal/apl/91/6/10.1063/1.2768870
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2768870

Figures

Image of FIG. 1.
FIG. 1.

(Color online) AFM micrographs of epilayers: (a) as-grown and (b) hydrogen etched at for . Step height and terrace width along the [110] direction are depicted in the higher resolution images and by line profile extracted from these.

Image of FIG. 2.
FIG. 2.

(Color online) UHV analysis of hydrogen etched sample: (a) LEED pattern of the phase as observed after hydrogen etching (without any further treatment). (b) LEED pattern of the phase obtained after Si deposition and annealing to . (c) AES spectra with the Si, C, and O transitions indicated for the hydrogen etched and the annealed sample, and (d) for the , , and phases.

Tables

Generic image for table
Table I.

Peak-to-peak amplitudes of the differentiated Si, C, and O AES signals and element intensity ratios for the different structures observed in the present work on . For comparison data are listed for the so-called silicate layer reconstructions on the basal plane surfaces SiC(0001) and taken from Ref. 1.

Loading

Article metrics loading...

/content/aip/journal/apl/91/6/10.1063/1.2768870
2007-08-08
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface studies of hydrogen etched 3C-SiC(001) on Si(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/6/10.1063/1.2768870
10.1063/1.2768870
SEARCH_EXPAND_ITEM