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(Color online) AFM micrographs of epilayers: (a) as-grown and (b) hydrogen etched at for . Step height and terrace width along the  direction are depicted in the higher resolution images and by line profile extracted from these.
(Color online) UHV analysis of hydrogen etched sample: (a) LEED pattern of the phase as observed after hydrogen etching (without any further treatment). (b) LEED pattern of the phase obtained after Si deposition and annealing to . (c) AES spectra with the Si, C, and O transitions indicated for the hydrogen etched and the annealed sample, and (d) for the , , and phases.
Peak-to-peak amplitudes of the differentiated Si, C, and O AES signals and element intensity ratios for the different structures observed in the present work on . For comparison data are listed for the so-called silicate layer reconstructions on the basal plane surfaces SiC(0001) and taken from Ref. 1.
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