1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Laser assisted field induced oxide nanopatterning of hydrogen passivated silicon surfaces
Rent:
Rent this article for
USD
10.1063/1.2771061
/content/aip/journal/apl/91/7/10.1063/1.2771061
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771061
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

AFM images of FIO patterns created under a constant applied sample bias of with uncoated silicon probes. Illumination of the AFM probe only occurred for the first and last scan lines as well as lines in the middle of the scan. Nanopatterns were created with (a) heavily doped -type silicon probes, (b) heavily doped -type silicon probes, and (c) lightly doped -type silicon probes.

Image of FIG. 2.
FIG. 2.

AFM images of FIO patterns created under a constant applied sample bias of with coated silicon probes. Illumination of the AFM probe only occurred for the first and last scan lines as well as lines in the middle of the scan. Nanopatterns were created with probes coated with (a) gold, (b) conductive diamond, and (c) TiPt.

Image of FIG. 3.
FIG. 3.

Current-voltage curves for silicon probes on a gold substrate for various tip doping and illumination conditions. “ off” refers to a heavily doped -type silicon probe without illumination, and “ on/off” refers to a lightly doped -type silicon probe with and without illumination, respectively. The inset shows the “ off” trace between 5 and .

Image of FIG. 4.
FIG. 4.

AFM image of an FIO pattern created under a constant bias of with an toggle of the illumination (AFM fast scan rate is ). The laser remained on (i.e., was not toggled) for the first and last 15 lines. In addition, the relative phase and frequency of the laser toggle signal compared to the fast scan signal were varied throughout the nanopatterning to demonstrate control over the linewidth.

Loading

Article metrics loading...

/content/aip/journal/apl/91/7/10.1063/1.2771061
2007-08-17
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser assisted field induced oxide nanopatterning of hydrogen passivated silicon surfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771061
10.1063/1.2771061
SEARCH_EXPAND_ITEM