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Stabilization of higher- tetragonal by admixture enabling thermally stable metal-insulator-metal capacitors
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10.1063/1.2771376
/content/aip/journal/apl/91/7/10.1063/1.2771376
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771376
/content/aip/journal/apl/91/7/10.1063/1.2771376
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/content/aip/journal/apl/91/7/10.1063/1.2771376
2007-08-14
2014-09-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stabilization of higher-κ tetragonal HfO2 by SiO2 admixture enabling thermally stable metal-insulator-metal capacitors
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771376
10.1063/1.2771376
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