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(a) Leakage current vs CET relation for MIM capacitors with slight variation in thermal budget. (b) X-ray diffraction spectra suggesting crystallization of as source of leakage current degradation.
Area statistics of leakage current density for amorphous and monoclinic . Strong area dependence for crystalline suggests both an intrinsic and extrinsic (local defects) contribution.
(a) Evolution of dielectric constant with annealing temperature for and . (b) X-ray diffraction indicates crystallization into the tetragonal phase for .
(a) Statistics of leakage current density for amorphous and crystalline of the same thickness for areas and showing absence of local defects. (b) Leakage current vs CET relation for and MIM capacitors.
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