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Thick film without substrate
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10.1063/1.2771377
/content/aip/journal/apl/91/7/10.1063/1.2771377
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771377
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic diagram showing the procedure of fabricating the freestanding PZT film.

Image of FIG. 2.
FIG. 2.

SEM micrographs of the -thick PZT film sputtered on the a thin Pt layer. (a) Surface and (b) cross-sectional images.

Image of FIG. 3.
FIG. 3.

X-ray diffraction patterns of the PZT films with various thicknesses, viz., 6, 10, and . Peak intensities are in linear scale.

Image of FIG. 4.
FIG. 4.

Polarization hysteresis loops of the thickness freestanding PZT film.

Image of FIG. 5.
FIG. 5.

Ferroelectric properties of the freestanding PZT films as a function of the film thickness.

Image of FIG. 6.
FIG. 6.

Piezoelectric coefficient of the freestanding PZT films as a function of the film thickness.

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/content/aip/journal/apl/91/7/10.1063/1.2771377
2007-08-15
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thick Pb(Zr,Ti)O3 film without substrate
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2771377
10.1063/1.2771377
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