Full text loading...
(Color online) Schematic diagram showing the procedure of fabricating the freestanding PZT film.
SEM micrographs of the -thick PZT film sputtered on the a thin Pt layer. (a) Surface and (b) cross-sectional images.
X-ray diffraction patterns of the PZT films with various thicknesses, viz., 6, 10, and . Peak intensities are in linear scale.
Polarization hysteresis loops of the thickness freestanding PZT film.
Ferroelectric properties of the freestanding PZT films as a function of the film thickness.
Piezoelectric coefficient of the freestanding PZT films as a function of the film thickness.
Article metrics loading...