Full text loading...
Potential distribution along the retarding field analyzer axis (top) and schematic view of the electric circuit. The potential drops from the plasma potential to the variable mesh potential in the vicinity of the mesh electrode and linearly increase to the collector potential .
Volt-ampere characteristics measured at different axial positions in argon plasma sustained by incident microwave power of at the pressure of . The collector bias voltage was set at .
Electron energy distribution functions measured under the same conditions as volt-ampere characteristics in Fig. 2. The measured data are fitted by Maxwellian EEDF using Eq. (1). means the plasma potential.
Full range and detail of the EEDF measured at the axial position of .
Electron energy distribution functions measured at the axial position of in argon plasma sustained by incident microwave power of at the pressure of .
Article metrics loading...