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Spatial investigation of the electron energy distribution function of the high-energy electron beam sustained in the low-pressure microwave surface-wave plasma
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10.1063/1.2772196
/content/aip/journal/apl/91/7/10.1063/1.2772196
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2772196
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Potential distribution along the retarding field analyzer axis (top) and schematic view of the electric circuit. The potential drops from the plasma potential to the variable mesh potential in the vicinity of the mesh electrode and linearly increase to the collector potential .

Image of FIG. 2.
FIG. 2.

Volt-ampere characteristics measured at different axial positions in argon plasma sustained by incident microwave power of at the pressure of . The collector bias voltage was set at .

Image of FIG. 3.
FIG. 3.

Electron energy distribution functions measured under the same conditions as volt-ampere characteristics in Fig. 2. The measured data are fitted by Maxwellian EEDF using Eq. (1). means the plasma potential.

Image of FIG. 4.
FIG. 4.

Full range and detail of the EEDF measured at the axial position of .

Image of FIG. 5.
FIG. 5.

Electron energy distribution functions measured at the axial position of in argon plasma sustained by incident microwave power of at the pressure of .

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/content/aip/journal/apl/91/7/10.1063/1.2772196
2007-08-16
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spatial investigation of the electron energy distribution function of the high-energy electron beam sustained in the low-pressure microwave surface-wave plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/7/10.1063/1.2772196
10.1063/1.2772196
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