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Polarity inversion in high Mg-doped In-polar InN epitaxial layers
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10.1063/1.2773762
/content/aip/journal/apl/91/8/10.1063/1.2773762
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/8/10.1063/1.2773762
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Cross-sectional dark-field TEM images of a multiple-layer-structure InN film recorded with (a) and (b) , respectively. The sample structure is shown at the left side. The marked regions (a) and (b) by dashed-line rectangles in Fig. 1(a) are magnified and are shown in Fig. 2. The ETD densities at lines (1)–(3) in (b) are , , and , respectively.

Image of FIG. 2.
FIG. 2.

(Color online) Magnified TEM images of the corresponding regions (a) and (b) in Fig. 1(a).

Image of FIG. 3.
FIG. 3.

(Color online) Experimental and simulated CBED patterns recorded for positions A–E as marked in Fig. 1(a). The thicknesses , 90, 68, 64, and for A, B, C, D, and E, respectively.

Image of FIG. 4.
FIG. 4.

(Color online) AFM images of Mg:InN samples before and after chemical etching.

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/content/aip/journal/apl/91/8/10.1063/1.2773762
2007-08-23
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Polarity inversion in high Mg-doped In-polar InN epitaxial layers
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/8/10.1063/1.2773762
10.1063/1.2773762
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