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(a)  zone-axis SAD pattern taken from a plan-view C-doped film sample. (b) The model to explain the SAD pattern in (a). (c) HRTEM image taken along  showing an amorphous region between two 30°-rotated grains. The upper-right inset shows a clean boundary between two grains, and the lower-left inset shows two grains with a 4.5° rotation angle with respect to each other.
(a) -contrast image taken from a plan-view C-doped film sample. [(b) and (c)] CBED patterns taken from spots b and c in (a), respectively. (d) Carbon distribution derived from EELS line scan along the black line in (a).
(a) zone-axis SAD pattern taken from a cross-sectional C-doped film sample. (b) HRTEM image taken along showing the -axis tilt disorder. (c) BF image taken from the same orientation.
Schematic drawing showing the microstructure of C-doped films. The arrows indicate grains rotated by 30° and the triangles indicate grains with small-angle rotation about the axis.
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