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SEM micrographs of (a) the master stamp and (b) imprinted patterns on the GaN surface and (c) cross-sectional SEM micrograph of imprinted patterns on the GaN surface.
SEM micrographs of the etched formed by masked imprint patterns using ICP etch process: (a) top and (b) cross-sectional views.
(Color online) (a) SEM micrograph of lifted-off Cr patterns on the layer and (b) AFM results of the Cr pattern.
SEM micrographs of the patterned layer: (a) top and (b) tilted views.
(Color online) PL spectrum of unpatterned and patterned LED samples at room temperature.
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