1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography
Rent:
Rent this article for
USD
10.1063/1.2776980
/content/aip/journal/apl/91/9/10.1063/1.2776980
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/9/10.1063/1.2776980
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM micrographs of (a) the master stamp and (b) imprinted patterns on the GaN surface and (c) cross-sectional SEM micrograph of imprinted patterns on the GaN surface.

Image of FIG. 2.
FIG. 2.

SEM micrographs of the etched formed by masked imprint patterns using ICP etch process: (a) top and (b) cross-sectional views.

Image of FIG. 3.
FIG. 3.

(Color online) (a) SEM micrograph of lifted-off Cr patterns on the layer and (b) AFM results of the Cr pattern.

Image of FIG. 4.
FIG. 4.

SEM micrographs of the patterned layer: (a) top and (b) tilted views.

Image of FIG. 5.
FIG. 5.

(Color online) PL spectrum of unpatterned and patterned LED samples at room temperature.

Loading

Article metrics loading...

/content/aip/journal/apl/91/9/10.1063/1.2776980
2007-08-27
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fabrication of two-dimensional photonic crystal patterns on GaN-based light-emitting diodes using thermally curable monomer-based nanoimprint lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/9/10.1063/1.2776980
10.1063/1.2776980
SEARCH_EXPAND_ITEM