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Crystalline SiGe films grown on Si substrates using laser-assisted plasma-enhanced chemical vapor deposition at low temperature
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10.1063/1.2779103
/content/aip/journal/apl/91/9/10.1063/1.2779103
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/9/10.1063/1.2779103
/content/aip/journal/apl/91/9/10.1063/1.2779103
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/content/aip/journal/apl/91/9/10.1063/1.2779103
2007-08-30
2014-08-29
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Crystalline SiGe films grown on Si substrates using laser-assisted plasma-enhanced chemical vapor deposition at low temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/91/9/10.1063/1.2779103
10.1063/1.2779103
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