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XPS spectra (a) Si , (b) Hf , and (c) N , as a function of various annealing conditions.
Reflection electron energy loss spectra (REELS) with different electron gun energies; (a) . Band gap using (b) spectroscopic ellipsometry is well consistent with the REELS data.
Valence band spectra for the films (left side) and a band alignment diagram with Si (right side) as a function of various postannealing treatment.
MEIS spectra for a change in concentration in the depth direction as a function of postannealing treatment.
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