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(a) Schematic of nanopantography apparatus. (b) Expanded view of motorized stage.
Ion energy distribution of an beam extracted from the inductively coupled pulsed plasma. The voltage pulse on the acceleration ring electrode was from in the afterglow. pressure, modulation frequency, 50% duty cycle, and average plasma power.
Etching of nanotrenches by nanopantography: (a) top view of a portion of a diam lens array, (b) 45° view of a portion of a cleaved diam lens array, and (c) 45° view of an etched trench in a diam lens.
Etching of T-shaped features by nanopantography: (a) top view of a portion of a diam lens array and (b) 45° view of a portion of a diam lens array.
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