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Independently addressable fields of porous anodic alumina embedded in on Si
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematics illustrating the fabrication of electrically isolated PAA fields embedded in . (a) Lithographic patterning of electrodes on . (b) PECVD of followed by a patterned wet etch. (c) Lithographic definition of square fields on electrodes, dry and wet etching of , deposition and lift-off of film stack. (d) Anodization of the Al film stacks and subsequent cleaving of the common electrode.

Image of FIG. 2.
FIG. 2.

(a) Tilted cross-sectional FESEM image of a PAA field embedded in showing the boundary. (b) FESEM showing a PAA field on top of an independent electrode; note that covers the entire surface except where the PAA is embedded. (c) Top-view and (d) tilted cross-sectional FESEM images of the boundary with SWCNTs extending from the PAA onto the surface.

Image of FIG. 3.
FIG. 3.

(a) Optical image of a chip showing a PAA field on one independent electrode functionalized with Pd-decorated SWCNTs, while a PAA field on the neighboring electrode has been separately functionalized by coating the Pd nanoparticles with Au. Note that the entire surface (including the electrodes) is covered by except for the PAA fields. (b) and (c) are optical images of a PAA field with Pd nanoparticles on SWCNTs and with Au-coated Pd nanoparticles on SWCNTs, respectively. FESEM images of (d) a Pd nanoparticle decorating a SWCNT and (e) a Au-coated Pd nanoparticle decorating a SWCNT (arrows indicate SWCNT).


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Independently addressable fields of porous anodic alumina embedded in SiO2 on Si