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Pull-in instability of parallel-plate electrostatic microactuators under a combined variable charge and voltage configuration
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10.1063/1.2832770
/content/aip/journal/apl/92/1/10.1063/1.2832770
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/1/10.1063/1.2832770
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Electric field and charge distribution in a parallel plate capacitor partially filled with an electret.

Image of FIG. 2.
FIG. 2.

Surface charge distribution between two plates of a capacitor (area of ) partially filled with a thick Teflon® electret having a surface charge density of as a function of air gap.

Image of FIG. 3.
FIG. 3.

Membrane deflection curves vs surface charge density for (a) a membrane with (, , , ) and (b) a membrane with (, , , ).

Image of FIG. 4.
FIG. 4.

Normalized maximum membrane deflection vs the ratio of initial air gap to the electret layer thickness for several dielectrics.

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/content/aip/journal/apl/92/1/10.1063/1.2832770
2008-01-08
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Pull-in instability of parallel-plate electrostatic microactuators under a combined variable charge and voltage configuration
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/1/10.1063/1.2832770
10.1063/1.2832770
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