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(a) Diagram (not to scale) in cross section of a microchannel plasma structure fabricated by replica molding; (b) SEM of a portion of an array of 15 μm thick barriers (ribs) formed by replica molding. The width of the channels between the barriers is ∼23 μm.
Optical micrographs (at two values of magnification) of a square-folded microchannel with a cross section and an overall length of . The channel is shown operating in of Ne with a driving voltage of rms.
Photograph of a spiral microplasma channel having a length of and transverse dimensions of . The operating conditions are and .
Voltage-current characteristics for the spiral channel of Fig. 3. Data are given for Ne pressures between 500 and , and the vacuum characteristic is also shown. For , breakdown occurs at rms. The inset displays the conduction current that is calculated by accounting for the displacement current.
Variation of the power loading with the rms driving voltage for a linear channel ( in length), as well as the rectangular coil and spiral microchannels of Figs. 2 and 3, respectively. The devices were operated in of Ne and the values of power loading for the rectangular and spiral structures have been scaled by a factor of 4. The aspect ratio for each channel is given in parentheses in the upper portion of the figure.
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