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Low temperature plasma channels generated in microcavity trenches with widths of and aspect ratios as large as
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Diagram (not to scale) in cross section of a microchannel plasma structure fabricated by replica molding; (b) SEM of a portion of an array of 15 μm thick barriers (ribs) formed by replica molding. The width of the channels between the barriers is ∼23 μm.

Image of FIG. 2.
FIG. 2.

Optical micrographs (at two values of magnification) of a square-folded microchannel with a cross section and an overall length of . The channel is shown operating in of Ne with a driving voltage of rms.

Image of FIG. 3.
FIG. 3.

Photograph of a spiral microplasma channel having a length of and transverse dimensions of . The operating conditions are and .

Image of FIG. 4.
FIG. 4.

Voltage-current characteristics for the spiral channel of Fig. 3. Data are given for Ne pressures between 500 and , and the vacuum characteristic is also shown. For , breakdown occurs at rms. The inset displays the conduction current that is calculated by accounting for the displacement current.

Image of FIG. 5.
FIG. 5.

Variation of the power loading with the rms driving voltage for a linear channel ( in length), as well as the rectangular coil and spiral microchannels of Figs. 2 and 3, respectively. The devices were operated in of Ne and the values of power loading for the rectangular and spiral structures have been scaled by a factor of 4. The aspect ratio for each channel is given in parentheses in the upper portion of the figure.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Low temperature plasma channels generated in microcavity trenches with widths of 20–150μm and aspect ratios as large as 104:1