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High quality mechanical and optical properties of commercial silicon nitride membranes
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10.1063/1.2884191
/content/aip/journal/apl/92/10/10.1063/1.2884191
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/10/10.1063/1.2884191

Figures

Image of FIG. 1.
FIG. 1.

(a) Photograph of a Norcada x-ray membrane. (b) SEM of an SPI membrane.

Image of FIG. 2.
FIG. 2.

(b) Mechanical ringdown of the membrane. The membrane was driven by a piezoactuator which was stopped at . Inset shows the nonlinear mechanical response of the Norcada membrane. Solid lines are fits.

Image of FIG. 3.
FIG. 3.

(a) Comparison of versus magnetic field for the three lowest vibrational modes of the Norcada membrane. (b) Comparison of vs temperature for the three lowest vibrational modes of the Norcada membrane.

Image of FIG. 4.
FIG. 4.

Ringdown of transmission from cavity after the laser is chopped at , shown with fitted values of finesse.

Tables

Generic image for table
Table I.

Table of measured resonant frequency and for several vibrational modes of a Norcada thick membrane at . For all modes except (1,1) the deviation from the theoretical resonant frequency is given.

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/content/aip/journal/apl/92/10/10.1063/1.2884191
2008-03-14
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High quality mechanical and optical properties of commercial silicon nitride membranes
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/10/10.1063/1.2884191
10.1063/1.2884191
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