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3D elemental map of the MOSFET structure sample. As (yellow), B (white), O (blue), and Si (magenta). For visual clarity, only 5% of the Si atoms are plotted.
Mass spectrum of the MOSFET structure sample.
1D As atom distribution in the depth direction from the 3DAP and SIMS analyses.
Enlarged view of the 3D elemental map around the gate oxide. As (yellow) and O (blue). Both interfaces (polycrystalline Si gate/gate oxide and gate oxide/Si substrate) are drawn by wire frame (magenta).
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