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Quantum chemical study of the initial surface reactions of atomic layer deposition GaAs for photonic crystal fabrication
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10.1063/1.2901880
/content/aip/journal/apl/92/11/10.1063/1.2901880
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/11/10.1063/1.2901880
/content/aip/journal/apl/92/11/10.1063/1.2901880
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/content/aip/journal/apl/92/11/10.1063/1.2901880
2008-03-19
2014-10-31
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantum chemical study of the initial surface reactions of atomic layer deposition GaAs for photonic crystal fabrication
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/11/10.1063/1.2901880
10.1063/1.2901880
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