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Quantum chemical study of the initial surface reactions of atomic layer deposition GaAs for photonic crystal fabrication
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10.1063/1.2901880
/content/aip/journal/apl/92/11/10.1063/1.2901880
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/11/10.1063/1.2901880

Figures

Image of FIG. 1.
FIG. 1.

cluster model representing surface. The red, cyan, and white balls represent O, Si, and H atoms, respectively.

Image of FIG. 2.
FIG. 2.

Reaction pathway for the reaction of gaseous trimethylgallium (TMGa) on surface. CS, TS, PS, and DS represent the TMGa chemisorption state, transition state, physisorption state, and desorption state, respectively. The representative bonds are shown with dashed lines. The red, cyan, gray, brown, and white atoms represent O, Si, C, Ga, and H atoms, respectively.

Image of FIG. 3.
FIG. 3.

Reaction pathway for the reaction of arsenic hydride on surface. CS, TS, PS, and DS represent the chemisorption state, transition state, physisorption state, and desorption state, respectively. The representative bonds are shown with dashed lines. The red, cyan, gray, brown, purple, and white atoms represent O, Si, C, Ga, As, and H atoms, respectively.

Tables

Generic image for table
Table I.

Representative bond lengths for the structures of different states and reaction energy for the TMGa half-reaction. All bonds are shown in angstroms while energies are shown in kcal/mol.

Generic image for table
Table II.

Representative bond lengths for the structures of different states and reaction energy at for the half-reaction. All bonds are shown in angstroms while energies are shown in kcal/mol.

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/content/aip/journal/apl/92/11/10.1063/1.2901880
2008-03-19
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quantum chemical study of the initial surface reactions of atomic layer deposition GaAs for photonic crystal fabrication
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/11/10.1063/1.2901880
10.1063/1.2901880
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