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An alternative of spectroscopic ellipsometry: The double-reference method
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View: Figures


Image of FIG. 1.
FIG. 1.

Panels (a) and (b): normal-incidence reflectivity spectra of the vacuum-sample and diamond-sample interfaces, as calculated from the dielectric function for , and with the plasma frequency set to unity. Gaussian noise with standard deviation is introduced to both and . Panels (c) and (d): the refractive index and the extinction coefficient as obtained from the above reflectivities using the DRS (closed circles) and the RAE (open circles) approaches. The complex refractive index free of noise is indicated by full lines.

Image of FIG. 2.
FIG. 2.

Color map of the absolute error of the complex refractive index, as calculated by the DRS (left panels) and the RAE (right panels). The upper and lower panels show the error for the refractive index and the extinction coefficient , respectively. Full lines with labels correspond to the spectra shown in Fig. 1.

Image of FIG. 3.
FIG. 3.

Experimental condition for the measurement of . Reflection from the vacuum-diamond and diamond-sample interfaces are indicated. Wedging of the window avoids multiple reflections within the diamond and allows for a clean separation of the reflections from the two interfaces and, thus, facilitates reference measurements.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: An alternative of spectroscopic ellipsometry: The double-reference method