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NSOM setup. A tuning fork was used to maintain tip-sample distance roughly at . Optical intensity was measured in transmission mode.
LED fabricated on the silicon probe. A silicon dioxide layer created between layers of phosphorus doped silicon and gallium doped silicon worked as a light emitter.
Characteristics of the nanoscale LED.
Optical images taken with two different probes with different voltage polarities. The light intensity slopes showed angular dependence of resolution which can be correlated to the polarity of the light source.
Topographic image taken by the probe. SEM image of the chromium pattern is on the upper right panel. Topographic resolution was low in direction.
Optical and topographic images of a chromium target taken at the same scan. Larger image shift was observed in direction, which corresponds to the direction of FIB milling.
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