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Dark-field TEM plan-view images of film: (a) and (b). Edge dislocations parallel to the arrowed direction are out of contrast.
Two-beam dark field TEM images of film [(a) and (b)] and dislocation lines arrangement at the interface in the case of the Si (001) substrate tilted 6° about the axis [(c) and (d)]. Schemes.
Two-beam dark field TEM images of center [(a) and (b)] and dislocation line arrangements nearby [(c) and (d)]. Schemes.
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