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Intrinsic stress evolution at various deposition temperatures.
Raman spectra of NCD films deposited at different substrate temperatures. The intensity is normalized.
H content in NCD films deposited at different temperatures. (The measured depth is around from top surface).
Density, elastic modulus, and hardness of NCD films deposited at different substrate temperatures (a) measured with laserwave acoustics systems and (b) measured by nanoindentation.
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