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Intrinsic stress evolution in nanocrystalline diamond thin films with deposition temperature
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10.1063/1.2906903
/content/aip/journal/apl/92/13/10.1063/1.2906903
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/13/10.1063/1.2906903
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Intrinsic stress evolution at various deposition temperatures.

Image of FIG. 2.
FIG. 2.

Raman spectra of NCD films deposited at different substrate temperatures. The intensity is normalized.

Image of FIG. 3.
FIG. 3.

H content in NCD films deposited at different temperatures. (The measured depth is around from top surface).

Image of FIG. 4.
FIG. 4.

Density, elastic modulus, and hardness of NCD films deposited at different substrate temperatures (a) measured with laserwave acoustics systems and (b) measured by nanoindentation.

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/content/aip/journal/apl/92/13/10.1063/1.2906903
2008-04-02
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Intrinsic stress evolution in nanocrystalline diamond thin films with deposition temperature
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/13/10.1063/1.2906903
10.1063/1.2906903
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