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A -component magnetoresistive sensor
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Deposition geometry illustrating the relative angles during deposition.(b) SEM image of two sensors defined in a micromachined v groove and their corresponding electrical contacts.

Image of FIG. 2.
FIG. 2.

(a) A schematic cross-sectional view of the sensor geometry in the plane. Here, is the angle between the {100} and {111} planes. (b) Vector diagram of the projections of the applied field in the plane and their respective projections on the {111} plane .

Image of FIG. 3.
FIG. 3.

Hard axis transfer curve data for sensors 1 (gray circles) and 2 (black circles). The geometry of the measurement described in the inset shows the direction of the applied field . The solid lines represent a fit of the data at zero field to a parabola.

Image of FIG. 4.
FIG. 4.

Output voltage of the sensor bridge for fields in the direction (solid circles) and direction (gray circles). The upper inset shows the schematic design of the bridge where the numbers 2 and 3 correspond to sensors 2 and 3, respectively. The lower inset shows the in-plane signal magnified 100 times.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A z-component magnetoresistive sensor