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Production of high-density capacitive plasma by the effects of multihollow cathode discharge and high-secondary-electron emission
5.C. P. Munson, R. J. Faehl, I. Henins, M. Nastasi, W. A. Reass, D. J. Rej, J. T. Scheuer, K. C. Walter, and B. P. Wood, Surf. Coat. Technol. 84, 528 (1996).
6.A. Grill, B. S. Meyerson, and V. V. Patel, IBM J. Res. Dev. 34, 849 (1990).
7.O. Takai, V. Anita, and N. Saito, Surf. Coat. Technol. 200, 1106 (2005).
8.A. von Engel, Ionized Gases (Clarendon, Oxford, 1955).
11.F. F. Chen, in Plasma Diagnostic Techniques, edited by R. H. Huddlestone and S. L. Leonard (Academic, New York, 1965), Chap. 4.
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