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SIMS profiles of B motion in the as-implanted sample and after annealing at for in , , and . SIMS profile for B in is omitted for clarity.
B diffusivites for , , and at for a series of annealing times. B diffusivities for are omitted for clarity.
Arrhenius plot of B diffusivities for , , , and . Annealing times ranged from 0.2 to .
Activation energy for B diffusion and diffusion coefficient from Arrhenius fits to the B diffusivity data for alloys.
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