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Silicon depletion layer actuators
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10.1063/1.2920440
/content/aip/journal/apl/92/18/10.1063/1.2920440
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/18/10.1063/1.2920440
/content/aip/journal/apl/92/18/10.1063/1.2920440
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/content/aip/journal/apl/92/18/10.1063/1.2920440
2008-05-09
2014-10-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Silicon depletion layer actuators
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/18/10.1063/1.2920440
10.1063/1.2920440
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