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Schematic diagram of the experimental setup.
Typical XPS spectra of a silicon witness plate before (a) and after (b) laser irradiation. The outset represents magnified O spectra. In (b), the plate was exposed by 20 000 double-pulse irradiations with a delay of .
XPS intensity of Sn signals (a) and the thickness of deposited debris (b) as a function of the number of laser pulses. Squares and circles are by single-pulse and double-pulse irradiations, respectively.
Sn intensities (a) and O integrated intensities (b) of silicon plates as a function of the number of laser pulses at different temperatures.
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