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Deposited debris characteristics and its reduction of a laser-produced plasma extreme ultraviolet source using a colloidal tin dioxide jet target
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10.1063/1.2924302
/content/aip/journal/apl/92/18/10.1063/1.2924302
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/18/10.1063/1.2924302
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic diagram of the experimental setup.

Image of FIG. 2.
FIG. 2.

Typical XPS spectra of a silicon witness plate before (a) and after (b) laser irradiation. The outset represents magnified O spectra. In (b), the plate was exposed by 20 000 double-pulse irradiations with a delay of .

Image of FIG. 3.
FIG. 3.

XPS intensity of Sn signals (a) and the thickness of deposited debris (b) as a function of the number of laser pulses. Squares and circles are by single-pulse and double-pulse irradiations, respectively.

Image of FIG. 4.
FIG. 4.

Sn intensities (a) and O integrated intensities (b) of silicon plates as a function of the number of laser pulses at different temperatures.

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/content/aip/journal/apl/92/18/10.1063/1.2924302
2008-05-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Deposited debris characteristics and its reduction of a laser-produced plasma extreme ultraviolet source using a colloidal tin dioxide jet target
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/18/10.1063/1.2924302
10.1063/1.2924302
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