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High-speed x-ray reflectometory in multiwavelength-dispersive mode
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10.1063/1.2833690
/content/aip/journal/apl/92/2/10.1063/1.2833690
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/2/10.1063/1.2833690
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Figures

Image of FIG. 1.
FIG. 1.

Layout of the multiwavelength-dispersive x-ray reflectometer utilizing a curved crystal polychromator. and denote the highest and lowest energy x-rays diffracted by the crystal, respectively.

Image of FIG. 2.
FIG. 2.

Experimentally recorded x-ray reflectivity curve from a thick gold film on a silicon substrate. The glancing angle of the x-ray beam was 0.5335°. The data collection time for the reflected beam was for the detector position I (, ), for the detector position II (, ), for the detector position III (, ) and for the detector position IV (, ).

Image of FIG. 3.
FIG. 3.

Dependence of the data quality on the data collection time in the range ( at a glancing angle of 0.5263°). Each data point represents averaged value over every eight channels of the photodiode array. The data collection times were 1.0, 0.5, 0.1, and for curves A, B, C, and D, respectively. Curves B, C, and D have been shifted along the vertical axis for clarity.

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/content/aip/journal/apl/92/2/10.1063/1.2833690
2008-01-14
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-speed x-ray reflectometory in multiwavelength-dispersive mode
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/2/10.1063/1.2833690
10.1063/1.2833690
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