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Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematic of complete MLL made of two halves obtained from cross sections of a multilayer coating on a substrate.

Image of FIG. 2.
FIG. 2.

Scanning electron microscope image of the multilayer with magnified insets showing the individual layers at both ends and in the center. As illustrated by the color, the layers forming the zones vary in thickness from according to the zone plate law for a focal length of at , with 1588 alternating and Si layers for a total thickness of .

Image of FIG. 3.
FIG. 3.

Intensity distribution in the focal plane at from a -deep section of the multilayer of Fig. 2 at a tilt of 0.10° measured using fluorescence and scattering from a Pt analyzer scanned through the line focus. Also shown is the calculated result for this structure, with intensity scaled according to the measured and calculated integrated efficiencies. The widths are 17.6, 15.6, and FWHM for the fluorescence measurements, scattering measurements, and calculation; the measured and calculated efficiencies are 31% and 30%, respectively. The inset shows the isophote pattern near the focus, where coordinates and are parallel and transverse to the incident beam.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Focusing of hard x-rays to 16 nanometers with a multilayer Laue lens