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Characterization of a MgO film deposited on 6H-SiC (0001) shows smooth, conformal film with only (111) oriented MgO. XRD shows the presence of only (111) and (222) diffraction peaks. AFM indicates a rms roughness of between the step edges. RHEED pattern is characteristic of MgO (111) but shows the presence of some 3D features, as indicated by the Bragg spots. The incident electron beam is parallel to the step edges.
Capacitance per unit area as a function of gate voltage for a MgO film measured at four different frequencies (, , , and ). The measurement was done with a forward voltage sweep. A reverse sweep shows hysteresis with a uniform width of . The inset shows plots for the same sample measured at on the same scale as the main plot.
Plot of inverse capacitance per unit area under strong accumulation vs MgO layer thickness. The slope of the linear fit shows an intrinsic MgO dielectric constant of 10 and the intercept shows a series capacitance with an equivalent thickness of .
Plot of leakage current as a function of electric field for epitaxial MgO on . The measurement was performed on a thick sample with a circular top electrode diameter of . The vertical line corresponds to an electric field of . The inset shows breakdown statistics for 27 devices over a area.
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