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[(a) and (e)] XTEM images of the as-implanted structure. XTEM images of specimens annealed for with applied stress of (b) , (c) , (d) , (f) 0, (g) , and (h) .
thickness versus anneal time behavior for different applied stress values as superimposed on the SIMS-determined B concentration profile.
Effect of B concentration on growth velocity for different applied stress values .
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