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Facet dependent reactivity and selective deposition of nanometer sized on diamond surfaces
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10.1063/1.2944143
/content/aip/journal/apl/92/24/10.1063/1.2944143
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/24/10.1063/1.2944143
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) and (b) show FE-SEM surface morphologies of two films deposited on BEN pretreated Si substrates at temperatures of 700 and , respectively, with a TMS addition of 0.05% to and . (c) TEM image of a pure [001] oriented diamond film.

Image of FIG. 2.
FIG. 2.

The energy levels of FMOs (with isosurfaces as inset) and other nearby orbitals of the reactants of HOMO, diamond nanoparticle , and . The two energy levels with equal value next to the HOMO of or are degenerate.

Image of FIG. 3.
FIG. 3.

Backscattered FE-SEM cross-sectional morphology of a film deposited with a continuous variation of TMS gas from a value of 0.0506% to 0% during the deposition. The brighter spotlike regions represent phase.

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/content/aip/journal/apl/92/24/10.1063/1.2944143
2008-06-17
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Facet dependent reactivity and selective deposition of nanometer sized β-SiC on diamond surfaces
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/24/10.1063/1.2944143
10.1063/1.2944143
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