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characteristics of A/S/4H-SiC and S/4H-SiC MSM photodetectors: (a) photocurrent at the wavelength of from and (b) dark current from . The inset shows the schematic structure of the A/S/4H-SiC MSM photodetectors.
(a) Spectral response and external QE of A/S/4H-SiC and S/4H-SiC MSM photodetectors from with spectral resolution of under bias voltages from . (b) Reflection spectra of the evaporated A/S films and thermally grown layer on 4H-SiC substrates in the spectral range of with spectral resolution of .
Comparison of response and reflection spectra for A/S/4H-SiC MSM photodetectors from at electrical bias.
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