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Monocrystalline heterostructures for high-reflectivity high- micromechanical resonators in the megahertz regime
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10.1063/1.2952512
/content/aip/journal/apl/92/26/10.1063/1.2952512
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/26/10.1063/1.2952512
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Figures

Image of FIG. 1.
FIG. 1.

(a) Sketch of the initial layers constituting the Bragg mirror and illustration of the etch process used to fabricate freestanding structures. (b) Micrograph of a group of cantilevers. The beams shown have a width of and vary in length between 50 and . (c) The finesse of the cavity is obtained by measuring the reflected intensity as a function of laser detuning . The observed linewidth of corresponds to an optical finesse of 5500.

Image of FIG. 2.
FIG. 2.

(a) Fundamental mechanical mode of a long doubly clamped resonator at 300 and . Central frequencies are 731 and , respectively. The corresponding factors are 2200 and 12 000. (b) Second order mode of the same resonator showing s of 5000 and 20 000 for frequencies of 1.997 and at 300 and , respectively.

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/content/aip/journal/apl/92/26/10.1063/1.2952512
2008-07-01
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Monocrystalline AlxGa1−xAs heterostructures for high-reflectivity high-Q micromechanical resonators in the megahertz regime
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/26/10.1063/1.2952512
10.1063/1.2952512
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