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Overlap integral factor enhancement using buried electrode structure in polymer Mach-Zehnder modulator
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10.1063/1.2827196
/content/aip/journal/apl/92/3/10.1063/1.2827196
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/3/10.1063/1.2827196

Figures

Image of FIG. 1.
FIG. 1.

Cross section of (a) the in-plane CPW MZ and (b) the buried CPW MZ. The solid arrow represents the position of the optical mode center and the dotted line is the electric field distribution. is the gap spacing, is the waveguide width, is the trench depth, and is the core thickness.

Image of FIG. 2.
FIG. 2.

Overlap integral factors of the polymer MZ modulators in three different electrode structures. The optical waveguide used in this calculation has , , and . is . The core-cladding index contrast is 0.1 and the normalizing optical mode size is .

Image of FIG. 3.
FIG. 3.

Fabrication procedures.

Image of FIG. 4.
FIG. 4.

SEM cross sectional image of the fabricated device using AJL8/APC EO polymer. One of the MZ arms is shown.

Image of FIG. 5.
FIG. 5.

Modulated output waveform of the buried CPW MZ using AJL8/APC. The triangular modulating signal is applied to the electrode through a signal amplifier.

Tables

Generic image for table
Table I.

Measured and the efficiency product of the fabricated MZ devices.

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/content/aip/journal/apl/92/3/10.1063/1.2827196
2008-01-23
2014-04-19
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Overlap integral factor enhancement using buried electrode structure in polymer Mach-Zehnder modulator
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/3/10.1063/1.2827196
10.1063/1.2827196
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