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(a) Testing an integrated nanophotonic circuit using metal grating fiber probes. The orange arrows represent the flow of light. (b) Light is coupled between the fiber and the waveguide via metal grating attached to the fiber facet. (c) Two-dimensional field plot of metal grating induced light coupling between the waveguide and the fiber probe.
Alignment tolerancy analysis by two-dimensional FDTD calculations. The coupling efficiency is calculated as a function of relative position of the gold grating with respect to the fiber core. The insets illustrate the relative grating position.
Fiber probe fabrication using nanoimprint and transfer lithography. First, the fiber with UV-curable resist is aligned over the specially prepared mold carrying the gold grating pattern in the mold trenches. Then, the cavities are filled and the resist is UV cured. Finally, the mold is released. The metal grating is now attached to the fiber.
(a) Microscope image of the fiber probe facet containing gold gratings. (b) SEM picture of the fiber facet. The middle grating is aligned to the core. (c) Detail of the gold grating.
(a) Experimentally determined wavelength-dependent coupling efficiency between a gold fiber probe and a waveguide. (b) Testing of a SOI microring resonator using two probes.
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