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(a) Schematic illustration of a piezoelectrically actuated tunable capacitor with simply supported bridge structure. (b) Scanning electron microscope (SEM) image of the fabricated tunable capacitor.
Measured piezoelectric displacements for unbiased (a) sinusoidal, (b) triangular, and (c) square voltage waveforms at .
Measured piezoelectric displacement versus actuation voltage for (a) the cantilever and (b) the simply supported bridge.
Measured mechanical frequency response for (a) the cantilever and (b) the simply supported bridge.
(a) Measured Smith charts for tunable capacitor at actuation voltage of (i) , (ii) , (iii) , and (iv) , from . (b) Comparison of experimental and theoretical capacitance-versus-voltage curves.
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