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Surface micromachined, complementary-metal-oxide-semiconductor compatible tunable capacitor with 14:1 continuous tuning range
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10.1063/1.2838447
/content/aip/journal/apl/92/4/10.1063/1.2838447
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2838447
/content/aip/journal/apl/92/4/10.1063/1.2838447
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/content/aip/journal/apl/92/4/10.1063/1.2838447
2008-01-29
2014-09-02
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface micromachined, complementary-metal-oxide-semiconductor compatible tunable capacitor with 14:1 continuous tuning range
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2838447
10.1063/1.2838447
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