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In situ arsenic-doped selective epitaxial growth under atmospheric pressure
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10.1063/1.2838724
/content/aip/journal/apl/92/4/10.1063/1.2838724
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2838724
/content/aip/journal/apl/92/4/10.1063/1.2838724
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/content/aip/journal/apl/92/4/10.1063/1.2838724
2008-01-30
2014-10-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: In situ arsenic-doped Si1−yCy selective epitaxial growth under atmospheric pressure
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2838724
10.1063/1.2838724
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