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High-frequency metallic nanomechanical resonators
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Image of FIG. 1.
FIG. 1.

Schematic diagrams of the processing steps for the metallic nanomechanical resonators as described in the text.

Image of FIG. 2.
FIG. 2.

SEM images of the long Al beam. (a) Tilted side view of the beam. (b) Enlarged left end of the beam clamped to the wider electrode. The calixarene beneath the beam is completely etched away but preserved under the clamp electrodes to support the structure. (c) The magnetomotive detection measurement scheme. The beam is placed in vacuum at and connected with coaxial cables to a network analyzer through attenuators. The magnetic field is perpendicular to the chip.

Image of FIG. 3.
FIG. 3.

as a function of the driving current frequency. The magnetic field increases from from bottom to top with a step. Inset: dependence of on the magnetic field. Fitting gives . The power is and temperature is .

Image of FIG. 4.
FIG. 4.

as a function of the driving current frequency. From the bottom, the driving power increases from with a step. Left inset: linear dependence of the square of on the driving power. Right inset: the nonlinearity and hysteresis show up when the driving power is large enough. The power is for the curve shown here. The axes are the same as those in the main plot.


Generic image for table
Table I.

Estimated resonance frequency , measured resonance frequency , measured quality factor and product of and of the beams with different dimesions, , and made of different metals.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High-frequency metallic nanomechanical resonators