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High resolution vacuum scanning thermal microscopy of and
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10.1063/1.2840186
/content/aip/journal/apl/92/4/10.1063/1.2840186
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2840186
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Schematic of a cantilevered thermal probe in touch with the sample (not to scale). (b) Circuitry to measure the temperature dependent electric resistance of the probe.

Image of FIG. 2.
FIG. 2.

(a) Topography image of the surface obtained in air using the standard AFM imaging technique (tapping mode). (b) Thermal signal image of the surface obtained in vacuum. The grayscale corresponds to approximately variation in the heater temperature.

Image of FIG. 3.
FIG. 3.

Approach and retract curves measured using a heated tip.

Image of FIG. 4.
FIG. 4.

Histogram of thermal resistance values obtained for pixels of Fig. 2 that could be clearly attributed to either or .

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/content/aip/journal/apl/92/4/10.1063/1.2840186
2008-01-31
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High resolution vacuum scanning thermal microscopy of HfO2 and SiO2
http://aip.metastore.ingenta.com/content/aip/journal/apl/92/4/10.1063/1.2840186
10.1063/1.2840186
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